Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982346 | Integrated elastomeric lipseal and cup bottom for reducing wafer sticking | Aaron Berke, Robert Rash, Steven T. Mayer, Lee Peng Chua | 2021-04-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982346 | Integrated elastomeric lipseal and cup bottom for reducing wafer sticking | Aaron Berke, Robert Rash, Steven T. Mayer, Lee Peng Chua | 2021-04-20 |