Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204332 | Repeater defect detection | Bjorn Brauer, Sumit Sen, Ashok Mathew, Sreeram Chandrasekaran, Lisheng Gao | 2021-12-21 |
| 11138722 | Differential imaging for single-path optical wafer inspection | Anatoly Shchemelinin, Ilya Bezel | 2021-10-05 |
| 11139216 | System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer | David Craig Oram, Abhinav Mathur, Kenong Wu | 2021-10-05 |
| 10976025 | Plasma cell for providing VUV filtering in a laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more | 2021-04-13 |
| 10887974 | High efficiency laser-sustained plasma light source | Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin | 2021-01-05 |