Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11138722 | Differential imaging for single-path optical wafer inspection | Anatoly Shchemelinin, Eugene Shifrin | 2021-10-05 |
| 11121521 | System and method for pumping laser sustained plasma with interlaced pulsed illumination sources | Matthew Derstine, William Alexander Schumaker, Michael Friedmann | 2021-09-14 |
| 11035727 | Spectrometer for vacuum ultraviolet measurements in high-pressure environment | Anatoly Shchemelinin | 2021-06-15 |
| 10976025 | Plasma cell for providing VUV filtering in a laser-sustained plasma light source | Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more | 2021-04-13 |
| 10887974 | High efficiency laser-sustained plasma light source | Matthew Derstine, Anatoly Shchemelinin, Eugene Shifrin | 2021-01-05 |