Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10976025 | Plasma cell for providing VUV filtering in a laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Derstine, Jincheng Wang +3 more | 2021-04-13 |