AM

Abhinav Mathur

KL Kla-Tencor: 1 patents #28 of 134Top 25%
Overall (2021): #545,669 of 548,734Top 100%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11139216 System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer David Craig Oram, Kenong Wu, Eugene Shifrin 2021-10-05