Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133189 | Metal cut patterning and etching to minimize interlayer dielectric layer loss | Kisup Chung, Ekmini Anuja De Silva, Andrew M. Greene, Indira Seshadri | 2021-09-28 |
| 11054250 | Multi-channel overlay metrology | Gangadhara Raja Muthinti, Chiew-Seng Koay, Nelson Felix | 2021-07-06 |
| 11024715 | FinFET gate cut after dummy gate removal | John R. Sporre, Andrew M. Greene, Jeffrey C. Shearer, Nicole Saulnier | 2021-06-01 |