Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199363 | Method for removing a contamination layer by an atomic layer etching process | Fred Roozeboom, Dirk Heinrich Ehm, Andrea Illiberi, Edwin Te Sligte, Yves Lodewijk Maria Creijghton | 2021-12-14 |
| 11137687 | Optical arrangement for EUV radiation with a shield for protection against the etching effect of a plasma | Bjoern Liebaug, Kerstin Hild, Joachim Hartjes, Simon Haas | 2021-10-05 |