Issued Patents 2021
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177127 | Functionalized cyclosilazanes as precursors for high growth rate silicon-containing films | Matthew R. MacDonald | 2021-11-16 |
| 11142658 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Ronald Martin Pearlstein, Jianheng Li | 2021-10-12 |
| 11139162 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Xinjian Lei, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2021-10-05 |
| 11098069 | Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films | Matthew R. MacDonald, Xinjian Lei, Meiliang Wang | 2021-08-24 |
| 11049714 | Silyl substituted organoamines as precursors for high growth rate silicon-containing films | Matthew R. MacDonald | 2021-06-29 |
| 11043374 | Silacycloalkane compounds and methods for depositing silicon containing films using same | Robert Gordon Ridgeway, Daniel P. Spence, Xinjian Lei, Raymond Nicholas Vrtis | 2021-06-22 |
| 11035039 | Compositions and methods for depositing silicon nitride films | Xinjian Lei, Moo-Sung Kim | 2021-06-15 |
| 11017998 | Precursors and flowable CVD methods for making low-K films to fill surface features | Jianheng Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Xinjian Lei | 2021-05-25 |
| 10991571 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill | 2021-04-27 |
| 10899500 | Alkoxysilylamine compounds and applications thereof | Ronald Martin Pearlstein, Richard Ho, Daniel P. Spence, Xinjian Lei | 2021-01-26 |