Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177136 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Paul B. Reuter, Imad Yousif, Aniruddha Pal | 2021-11-16 |
| 11171008 | Abatement and strip process chamber in a dual load lock configuration | Jared Ahmad Lee, Paul B. Reuter, Imad Yousif, Aniruddha Pal | 2021-11-09 |
| 10991552 | Cooling mechanism utilized in a plasma reactor with enhanced temperature regulation | Aniruddha Pal, Victor Calderon, Valentin N. Todorow | 2021-04-27 |
| 10943788 | Abatement and strip process chamber in a load lock configuration | Paul B. Reuter, Andrew Nguyen, Jared Ahmad Lee | 2021-03-09 |