Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152244 | Electrostatic chuck | Hitoshi Sasaki, Kengo Maehata, Shumpei KONDO, Yuichi Yoshii | 2021-10-19 |
| 11018039 | Electrostatic chuck which reduces arc discharge | Jun Shiraishi, Ikuo Itakura, Yutaka MOMIYAMA, Shuichiro Saigan | 2021-05-25 |
| 10964577 | Electrostatic chuck | Yuichi Yoshii, Hitoshi Sasaki, Kengo Maehata | 2021-03-30 |
| 10923382 | Electrostatic chuck | Jumpei UEFUJI, Hitoshi Sasaki, Kengo Maehata, Yuichi Yoshii | 2021-02-16 |
| 10923383 | Electrostatic chuck | Takara Katayama, Ikuo Itakura, Yutaka MOMIYAMA, Jun Shiraishi, Shuichiro Saigan | 2021-02-16 |