Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923383 | Electrostatic chuck | Kosuke Yamaguchi, Ikuo Itakura, Yutaka MOMIYAMA, Jun Shiraishi, Shuichiro Saigan | 2021-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923383 | Electrostatic chuck | Kosuke Yamaguchi, Ikuo Itakura, Yutaka MOMIYAMA, Jun Shiraishi, Shuichiro Saigan | 2021-02-16 |