Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145532 | Electrostatic chuck | Masafumi IKEGUCHI, Tetsuro ITOYAMA, Shuichiro Saigan | 2021-10-12 |
| 11018039 | Electrostatic chuck which reduces arc discharge | Kosuke Yamaguchi, Ikuo Itakura, Yutaka MOMIYAMA, Shuichiro Saigan | 2021-05-25 |
| 10923383 | Electrostatic chuck | Takara Katayama, Kosuke Yamaguchi, Ikuo Itakura, Yutaka MOMIYAMA, Shuichiro Saigan | 2021-02-16 |