Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145532 | Electrostatic chuck | Masafumi IKEGUCHI, Shuichiro Saigan, Jun Shiraishi | 2021-10-12 |
| 10964579 | Electrostatic chuck | Jumpei UEFUJI | 2021-03-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145532 | Electrostatic chuck | Masafumi IKEGUCHI, Shuichiro Saigan, Jun Shiraishi | 2021-10-12 |
| 10964579 | Electrostatic chuck | Jumpei UEFUJI | 2021-03-30 |