Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964579 | Electrostatic chuck | Tetsuro ITOYAMA | 2021-03-30 |
| 10923382 | Electrostatic chuck | Hitoshi Sasaki, Kosuke Yamaguchi, Kengo Maehata, Yuichi Yoshii | 2021-02-16 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964579 | Electrostatic chuck | Tetsuro ITOYAMA | 2021-03-30 |
| 10923382 | Electrostatic chuck | Hitoshi Sasaki, Kosuke Yamaguchi, Kengo Maehata, Yuichi Yoshii | 2021-02-16 |