Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152244 | Electrostatic chuck | Kosuke Yamaguchi, Hitoshi Sasaki, Shumpei KONDO, Yuichi Yoshii | 2021-10-19 |
| 10964577 | Electrostatic chuck | Kosuke Yamaguchi, Yuichi Yoshii, Hitoshi Sasaki | 2021-03-30 |
| 10923382 | Electrostatic chuck | Jumpei UEFUJI, Hitoshi Sasaki, Kosuke Yamaguchi, Yuichi Yoshii | 2021-02-16 |