Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152244 | Electrostatic chuck | Kosuke Yamaguchi, Hitoshi Sasaki, Kengo Maehata, Yuichi Yoshii | 2021-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152244 | Electrostatic chuck | Kosuke Yamaguchi, Hitoshi Sasaki, Kengo Maehata, Yuichi Yoshii | 2021-10-19 |