Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145532 | Electrostatic chuck | Tetsuro ITOYAMA, Shuichiro Saigan, Jun Shiraishi | 2021-10-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145532 | Electrostatic chuck | Tetsuro ITOYAMA, Shuichiro Saigan, Jun Shiraishi | 2021-10-12 |