Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11018039 | Electrostatic chuck which reduces arc discharge | Kosuke Yamaguchi, Jun Shiraishi, Ikuo Itakura, Shuichiro Saigan | 2021-05-25 |
| 10943809 | Electrostatic chuck including ceramic dielectric substrate | Hitoshi Sasaki | 2021-03-09 |
| 10923383 | Electrostatic chuck | Takara Katayama, Kosuke Yamaguchi, Ikuo Itakura, Jun Shiraishi, Shuichiro Saigan | 2021-02-16 |