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Selective PEALD of oxide on dielectric |
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| 11145506 |
Selective passivation and selective deposition |
Jan Willem Maes, Michael Eugene Givens, Suvi Haukka, Vamsi K. Paruchuri, Ivo Raaijmakers +3 more |
2021-10-12 |
| 11094535 |
Selective passivation and selective deposition |
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| 11081342 |
Selective deposition using hydrophobic precursors |
Elina Färm, Hidemi Suemori, Raija H. Matero, Antti Niskanen, Suvi Haukka |
2021-08-03 |
| 11047040 |
Dual selective deposition |
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| 10991573 |
Uniform deposition of SiOC on dielectric and metal surfaces |
Lingyun Jia, Viljami Pore, Sun Ja Kim |
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| 10964534 |
Enhanced thin film deposition |
Antti Rahtu, Kai-Erik Elers, Wei Li |
2021-03-30 |
| 10923361 |
Deposition of organic films |
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| 10900120 |
Passivation against vapor deposition |
Varun Sharma |
2021-01-26 |