Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155919 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2021-10-26 |
| 10964534 | Enhanced thin film deposition | Eva Tois, Kai-Erik Elers, Wei Li | 2021-03-30 |