Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155919 | ALD of metal-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2021-10-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155919 | ALD of metal-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2021-10-26 |