Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170072 | Method and apparatus for inspection and metrology | Everhardus Cornelis Mos, Velislava IGNATOVA, Michael Kubis, Hubertus Johannes Gertrudus Simons, Peter Ten Berge +2 more | 2021-11-09 |
| 11106141 | Optimizing a sequence of processes for manufacturing of product units | Jochem Sebastiaan Wildenberg, Marinus Jochemsen, Erik Johannes Maria Wallerbos, Cornelis Johannes Rijnierse, Bijoy Rajasekharan +2 more | 2021-08-31 |
| 11036146 | Method and apparatus to reduce effects of nonlinear behavior | Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Peter Ten Berge, Peter Hanzen Wardenier, Hakki Ergün Cekli | 2021-06-15 |
| 10915689 | Method and apparatus to correct for patterning process error | Peter Ten Berge, Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Bernardo Kastrup +5 more | 2021-02-09 |