Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11110425 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Michael R. Rice | 2021-09-07 |
| 11098404 | Multi-station chamber lid with precise temperature and flow control | Gopu Krishna, Sanjeev Baluja, Michael R. Rice | 2021-08-24 |
| 10910243 | Thermal management system | Tejas Ulavi, Sanjeev Baluja | 2021-02-02 |