Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195713 | Methods of forming a silicon-insulator layer and semiconductor device having the same | Joachim Hirschler, Georg Ehrentraut, Christoffer Erbert, Klaus Goeschl, Markus Heinrici +6 more | 2021-12-07 |
| 11149351 | Apparatus and method for chemical vapor deposition process for semiconductor substrates | Matthias Kuenle, Johannes Baumgartl, Manfred Engelhardt, Christian Illemann, Francisco Javier Santos Rodriguez | 2021-10-19 |