Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149351 | Apparatus and method for chemical vapor deposition process for semiconductor substrates | Matthias Kuenle, Johannes Baumgartl, Manfred Engelhardt, Francisco Javier Santos Rodriguez, Olaf Storbeck | 2021-10-19 |
| 10906057 | Liquid-dispensing system, apparatus and method | Karl Pilch, Herbert Priess | 2021-02-02 |