Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149351 | Apparatus and method for chemical vapor deposition process for semiconductor substrates | Matthias Kuenle, Manfred Engelhardt, Christian Illemann, Francisco Javier Santos Rodriguez, Olaf Storbeck | 2021-10-19 |
| 11038028 | Semiconductor device and manufacturing method | Ingo Muri, Oliver Hellmund, Jacob Tillmann Ludwig, Iris Moder, Thomas Neidhart +2 more | 2021-06-15 |
| 11011409 | Devices with backside metal structures and methods of formation thereof | Oliver Hellmund, Ingo Muri, Iris Moder, Thomas Neidhart, Hans-Joachim Schulze | 2021-05-18 |
| 10923432 | Method of manufacturing a semiconductor device with epitaxial layers and an alignment mark | Andreas Moser, Hans Weber, Gabor Mezoesi, Michael Treu | 2021-02-16 |