Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149351 | Apparatus and method for chemical vapor deposition process for semiconductor substrates | Matthias Kuenle, Johannes Baumgartl, Christian Illemann, Francisco Javier Santos Rodriguez, Olaf Storbeck | 2021-10-19 |