Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195713 | Methods of forming a silicon-insulator layer and semiconductor device having the same | Joachim Hirschler, Christoffer Erbert, Klaus Goeschl, Markus Heinrici, Michael Hutzler +6 more | 2021-12-07 |