Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916650 | Uniform bottom spacer for VFET devices | Cheng Chi, Chanro Park, Ruilong Xie, Tenko Yamashita | 2021-02-09 |
| 10896972 | Self-aligned contact for vertical field effect transistor | Brent A. Anderson, Su Chen Fan, Balasubramanian Pranatharthiharan, Junli Wang, Ruilong Xie | 2021-01-19 |