Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171141 | Gap fill methods of forming buried word lines in DRAM without forming bottom voids | Priyadarshi Panda, Seshadri Ganguli, Sung-Kwan Kang, Gill Yong Lee, Sanjay Natarajan +2 more | 2021-11-09 |
| 11075276 | Methods and apparatus for n-type metal oxide semiconductor (NMOS) metal gate materials using atomic layer deposition (ALD) processes with metal based precursors | Yongjing Lin, Shih Chung Chen, Naomi Yoshida, Lin Dong, Liqi Wu +5 more | 2021-07-27 |
| 11060188 | Selective deposition of aluminum oxide on metal surfaces | Seshadri Ganguli | 2021-07-13 |
| 10930550 | Barrier for copper metallization and methods of forming | Seshadri Ganguli, Lu Chen | 2021-02-23 |