Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876870 | Method of determining flow rate of a gas in a substrate processing system | Norihiko Amikura, Kazuyuki Miura, Masaaki Nagase, Satoru Yamashita, Yohei Sawada +2 more | 2020-12-29 |
| 10871786 | Substrate processing system and method of determining flow rate of gas | Norihiko Amikura, Kazuyuki Miura, Hiroshi Yazaki, Yasuhiro SHOJI | 2020-12-22 |
| 10859426 | Method of inspecting flow rate measuring system | Jun Hirose, Norihiko Amikura, Shinobu Onodera | 2020-12-08 |
| 10845119 | Method of arranging treatment process | Jun Hirose, Norihiko Amikura | 2020-11-24 |
| 10788356 | Method of inspecting gas supply system, method of calibrating flow controller, and method of calibrating secondary reference device | Norihiko Amikura | 2020-09-29 |
| 10692743 | Method of inspecting gas supply system | — | 2020-06-23 |
| 10692744 | Method of inspecting gas supply system | — | 2020-06-23 |