Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871786 | Substrate processing system and method of determining flow rate of gas | Risako Miyoshi, Norihiko Amikura, Kazuyuki Miura, Yasuhiro SHOJI | 2020-12-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871786 | Substrate processing system and method of determining flow rate of gas | Risako Miyoshi, Norihiko Amikura, Kazuyuki Miura, Yasuhiro SHOJI | 2020-12-22 |