Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876870 | Method of determining flow rate of a gas in a substrate processing system | Risako Miyoshi, Norihiko Amikura, Masaaki Nagase, Satoru Yamashita, Yohei Sawada +2 more | 2020-12-29 |
| 10871786 | Substrate processing system and method of determining flow rate of gas | Risako Miyoshi, Norihiko Amikura, Hiroshi Yazaki, Yasuhiro SHOJI | 2020-12-22 |
| 10801521 | Heating device and turbo molecular pump | Tsutomu Mochizuki, Kazuhiro Chiba, Ryo Murakami | 2020-10-13 |