Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876870 | Method of determining flow rate of a gas in a substrate processing system | Risako Miyoshi, Norihiko Amikura, Kazuyuki Miura, Masaaki Nagase, Yohei Sawada +2 more | 2020-12-29 |
| 10646844 | Vaporization supply apparatus | Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Takatoshi NAKATANI +3 more | 2020-05-12 |
| 10604840 | Liquid level indicator and liquid raw material vaporization feeder | Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Keiji Hirao, Kouji Nishino +1 more | 2020-03-31 |