Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876870 | Method of determining flow rate of a gas in a substrate processing system | Risako Miyoshi, Norihiko Amikura, Kazuyuki Miura, Satoru Yamashita, Yohei Sawada +2 more | 2020-12-29 |
| 10646844 | Vaporization supply apparatus | Atsushi Hidaka, Kaoru Hirata, Katsuyuki Sugita, Takatoshi NAKATANI, Satoru Yamashita +3 more | 2020-05-12 |
| 10648572 | Valve with built-in orifice, and pressure-type flow rate control device | Yohei Sawada, Kaoru Hirata, Kouji Nishino, Nobukazu Ikeda | 2020-05-12 |
| 10604840 | Liquid level indicator and liquid raw material vaporization feeder | Atsushi Hidaka, Kaoru Hirata, Satoru Yamashita, Keiji Hirao, Kouji Nishino +1 more | 2020-03-31 |