Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801521 | Heating device and turbo molecular pump | Kazuhiro Chiba, Ryo Murakami, Kazuyuki Miura | 2020-10-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801521 | Heating device and turbo molecular pump | Kazuhiro Chiba, Ryo Murakami, Kazuyuki Miura | 2020-10-13 |