Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859426 | Method of inspecting flow rate measuring system | Norihiko Amikura, Risako Miyoshi, Shinobu Onodera | 2020-12-08 |
| 10845119 | Method of arranging treatment process | Norihiko Amikura, Risako Miyoshi | 2020-11-24 |
| 10840069 | Plasma processing apparatus and plasma control method | Yasuhiro Tobe | 2020-11-17 |