Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840069 | Plasma processing apparatus and plasma control method | Jun Hirose | 2020-11-17 |
| 10804082 | Substrate processing apparatus, and operation method for substrate processing apparatus | — | 2020-10-13 |
| 10651071 | Substrate processing apparatus and substrate removing method | — | 2020-05-12 |