Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811273 | Methods of surface restoration for nitride etching | Christopher Talone, Andrew Nolan, Sergey Voronin, Alok Ranjan | 2020-10-20 |
| 10699911 | Method of conformal etching selective to other materials | Sonam D. Sherpa, Alok Ranjan | 2020-06-30 |
| 10529589 | Method of plasma etching of silicon-containing organic film using sulfur-based chemistry | Li Wang, Andrew Nolan, Christopher Talone, Shyam Sridhar, Alok Ranjan +1 more | 2020-01-07 |