Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529589 | Method of plasma etching of silicon-containing organic film using sulfur-based chemistry | Erdinc Karakas, Andrew Nolan, Christopher Talone, Shyam Sridhar, Alok Ranjan +1 more | 2020-01-07 |