Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811269 | Method to achieve a sidewall etch | Nayoung Bae, Sergey Voronin, Alok Ranjan | 2020-10-20 |
| 10529589 | Method of plasma etching of silicon-containing organic film using sulfur-based chemistry | Erdinc Karakas, Li Wang, Andrew Nolan, Christopher Talone, Alok Ranjan +1 more | 2020-01-07 |