Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811273 | Methods of surface restoration for nitride etching | Erdinc Karakas, Andrew Nolan, Sergey Voronin, Alok Ranjan | 2020-10-20 |
| 10529540 | Advanced methods for plasma systems operation | Sergey Voronin, Alok Ranjan | 2020-01-07 |
| 10529589 | Method of plasma etching of silicon-containing organic film using sulfur-based chemistry | Erdinc Karakas, Li Wang, Andrew Nolan, Shyam Sridhar, Alok Ranjan +1 more | 2020-01-07 |