Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818502 | System and method of plasma discharge ignition to reduce surface particles | Jason Marion, Yusuke Yoshida, Alok Ranjan, Takashi Enomoto, Yoshio Ishikawa | 2020-10-27 |
| 10814336 | Apparatus for treating gas | Mark Attwood, Andrew Arthur Chambers, John Leslie Bidder | 2020-10-27 |
| 10818482 | Methods for stability monitoring and improvements to plasma sources for plasma processing | Yusuke Yoshida, Jason Marion, Alok Ranjan | 2020-10-27 |
| 10811273 | Methods of surface restoration for nitride etching | Christopher Talone, Erdinc Karakas, Andrew Nolan, Alok Ranjan | 2020-10-20 |
| 10811269 | Method to achieve a sidewall etch | Shyam Sridhar, Nayoung Bae, Alok Ranjan | 2020-10-20 |
| 10777385 | Method for RF power distribution in a multi-zone electrode array | Alok Ranjan | 2020-09-15 |
| 10651017 | Method for operation instability detection in a surface wave plasma source | Jason Marion, Alok Ranjan | 2020-05-12 |
| 10529540 | Advanced methods for plasma systems operation | Christopher Talone, Alok Ranjan | 2020-01-07 |