Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818482 | Methods for stability monitoring and improvements to plasma sources for plasma processing | Yusuke Yoshida, Sergey Voronin, Alok Ranjan | 2020-10-27 |
| 10818502 | System and method of plasma discharge ignition to reduce surface particles | Sergey Voronin, Yusuke Yoshida, Alok Ranjan, Takashi Enomoto, Yoshio Ishikawa | 2020-10-27 |
| 10651017 | Method for operation instability detection in a surface wave plasma source | Sergey Voronin, Alok Ranjan | 2020-05-12 |