Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818507 | Method of etching silicon nitride layers for the manufacture of microelectronic workpieces | Alok Ranjan | 2020-10-27 |
| 10770305 | Method of atomic layer etching of oxide | Alok Ranjan | 2020-09-08 |
| 10699911 | Method of conformal etching selective to other materials | Erdinc Karakas, Alok Ranjan | 2020-06-30 |
| 10658192 | Selective oxide etching method for self-aligned multiple patterning | Alok Ranjan | 2020-05-19 |
| 10607852 | Selective nitride etching method for self-aligned multiple patterning | Alok Ranjan | 2020-03-31 |