Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10668591 | Substrate cleaning device, substrate processing apparatus and substrate cleaning method | Hiromi Murachi, Ryuichi Yoshida, Koji Nishiyama, Chikara Sagae | 2020-06-02 |
| 10651056 | Treating liquid vaporizing apparatus | Atsushi Tanaka, Yukihiko Inagaki, Koji Nishi, Shigehiro Goto | 2020-05-12 |
| 10627836 | Pumping apparatus and substrate treating apparatus | Hiroyuki Ogura, Masahito KASHIYAMA, Satoshi Yamamoto, Hiroyuki Takeuchi, Shoji Kirita +2 more | 2020-04-21 |
| 10629463 | Thermal processing apparatus and thermal processing method | Yasuhiro Fukumoto, Koji Nishi, Shigehiro Goto, Kenichiro Jo, Atsushi Tanaka | 2020-04-21 |