Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10668591 | Substrate cleaning device, substrate processing apparatus and substrate cleaning method | Ryuichi Yoshida, Koji Nishiyama, Toru Momma, Chikara Sagae | 2020-06-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10668591 | Substrate cleaning device, substrate processing apparatus and substrate cleaning method | Ryuichi Yoshida, Koji Nishiyama, Toru Momma, Chikara Sagae | 2020-06-02 |