Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698315 | Substrate treating method | Masanori IMAMURA | 2020-06-30 |
| 10668591 | Substrate cleaning device, substrate processing apparatus and substrate cleaning method | Hiromi Murachi, Ryuichi Yoshida, Koji Nishiyama, Toru Momma | 2020-06-02 |