Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10824074 | Liquid processing apparatus and liquid processing method | — | 2020-11-03 |
| 10818520 | Substrate treating apparatus and substrate treating method | Koji Nishiyama, Kota KABUNE | 2020-10-27 |
| 10790165 | Pump apparatus and substrate treating apparatus | — | 2020-09-29 |
| 10627836 | Pumping apparatus and substrate treating apparatus | Toru Momma, Hiroyuki Ogura, Satoshi Yamamoto, Hiroyuki Takeuchi, Shoji Kirita +2 more | 2020-04-21 |
| 10617983 | Filter coupling device and a substrate treating apparatus having same | Akihiko Morita | 2020-04-14 |