Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651062 | Substrate treating apparatus | Yuji Tanaka, Tomohiro Matsuo, Takeharu Ishii | 2020-05-12 |
| 10629463 | Thermal processing apparatus and thermal processing method | Toru Momma, Koji Nishi, Shigehiro Goto, Kenichiro Jo, Atsushi Tanaka | 2020-04-21 |